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Futuristic Tunnel






Industiral AFM

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Introducing the most innovative and versatile AFM

Park Systems provides a range of popular AFMs for general research and industrial applications. Designed to be extremely versatile while still providing the accuracy and functionality necessary to do high quality work, Park AFMs offer researchers and engineers alike the ability to get the most accurate results quickly and easily.

Park AFM provides many unique features and functionalities that distinguish it from any other AFMs in the market. The smart scan software feature enables fully automated AFM approach and quick scan of sample surface. The true non-contact mode allows users to both take repeated measurements while preserving tip sharpness and not damage the sample surface. The pinpoint mode provides mechanical mapping on soft polymer surface which can be overlapped with AFM topography imaging. There are many more advanced options carried by Park AFMs. Please click the link below for a quick video tour about Park Systems and its up-to-date AFM products.


Key Features

Park NX10


NX10 is Park's latest research AFM invention, which is ideal for small (coupon size) sample scan and test.

 Nx10 has a small footprint and easy-to-use hardware and software, but still carries powerful AFM functions and many unique features.

The system is ideal for research, QC, and teaching purposes of AFM applications. It is a truely universal AFM product.

NX10 Key Advantages:

  • 2D Flexure-Guided Scanner with 50 μm x 50 μm Scan Range

  • High Speed Z Scanner with 15 μm Scan Range

  • Low Noise XYZ Position Sensors

  • Motorized XY Sample Stage

  • Step-and-Scan Automation

  • Accessible Sample Holder with up to 50x50x20 mm sample size

  • Expansion Slot for Advanced SPM Modes and Options

  • Direct On-Axis High Powered Optics with Integrated LED Illumination

  • Auto Engage by Slide-to-Connect SLD Head

  • Vertically Aligned Motorized Z Stage and Focus Stage

Park NX20


NX20 Key Advantages:

  • 2D Flexure-Guided Scanner with 150x150 (or 200x200) μm Scan Range

  • High Speed Z Scanner with 15 (or 30) μm Scan Range

  • Low Noise XYZ Position Sensors

  • Motorized XY Sample Stage

  • Step-and-Scan Automation

  • Accessible Sample Holder with up to 200 mm wafer sample size

  • Expansion Slot for Advanced SPM Modes and Options

  • Direct On-Axis High Powered Optics with Integrated LED Illumination

  • Auto Engage by Slide-to-Connect SLD Head

  • Vertically Aligned Motorized Z Stage and Focus Stage

NX20 carries a larger sample holder and a greater scan range than the smaller foot print NX10. NX20 is ideal for industrial or academic customers whose samples are usually in large size, and wish to scan different locations on the specimen surface with efficiency and automation.

Specially, NX20 is rated highly in the semiconductor and hard disk industry for its data accuracy.

Park NXBio


Park NX-Bio is a 3-in-1 bio-research tool that uniquely combines SICM with AFM and an inverted optical microscope (IOM) on the same platform.


The modular design of the Park NX-Bio allows researchers to easily switch between its SICM and AFM capabilities. Designed for non-invasive in-liquid imaging, Park NX-Bio is the ideal tool for studying biological materials under physiological conditions.

NXBio Integrates 3 Key Advantages into One System:

  • Scanning Ion Conductance Microscopy for Single Live Cell Imaging

  • Atomic Force Microscopy for Biomechanical Property Measurements

  • Inverted Optical Microscopy for Magnified Viewing


Park NXHivac

Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability​ of their ​AFM ​measurements through high vacuum ​environment.


As high vacuum ​measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide​r​ range of signal response​ in various failure analysis applications​​, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).

The NX-Hivac lets users set up automatic controls for vacuum pumping and venting, further streamlining the scanning process and reducing required human input. The average pumping speed is to about 10-5 torr in < 5 min using Turbo and Dry Pump.


The NX-Hivac features a chamber size of 300 mm X 420 mm X 320 mm, allowing users to scan more samples sizes and put more samples into the unit without breaking the vacuum seal.

Park XE7

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XE7 is the cost-effective solution of Park products, but still with all the state-of-the-art technology expected  from Park Systems,



Not only is Park XE7 the most affordable as a research grade AFM, it is also the most economical in total cost of ownership. Park's True Non-Contact™ mode technology found in the XE7 allows users to save money on costly probe tips. Moreover, Park XE7 offers you much longer product life and upgradeability as a result of its compatibility with the most extensive types of modes and options available in the industry.

Industrial AFMs

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3D is the revolutionary AFM from Park Systems. This completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements.

  • Z-head’s unique sideways orientation allows access to the undercut and overhang structures of photoresist and other industrial material

  • Patented decoupled XY and Z scanning systems work together with the tilted Z-scanner, letting users overcome normal challenges in accurate sidewall analysis associated with normal and flare tip methods

  • Sidewall trench line profile, roughness, critical angle and critical dimension can all be measured using the NX-3DM

  • Z-head tilting mechanism allows access to the sidewalls using an ultra-sharp tip to obtain the same high resolution and definition as is obtained over the rest of the material


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Park SmartScan is an automatic operating software for Park AFMs that allow high quality nanoscale imaging through three simple clicks of a mouse in auto mode, which rivals that made by experts using conventional techniques. SmartScan manual mode also provides all of the functions and tools necessary for more seasoned users to feel at home. This combination of extreme versatility, ease-of-use, and quality makes SmartScan the best AFM operating software available.

This capability allows examination of the effect of small oscillatory micro-motion on the durability of complex systems such as hip prostheses where small particles trapped between the ball and socket can slowly damage the contacting surfaces.


  • Fully programmable experimental conditions

  • High cycle wear

  • Friction measurements

  • Wide selection of indenter materials and geometries

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True NonContact Mode

Mechanical properties of materials often vary considerably when in their normal fluid environment compared to the usual laboratory dry testing conditions. Probing the mechanical properties of biological samples in fluid media should prove a closer mimic of in vivo conditions than conventional dry nanoindentation testing.

The testing capability of the NanoTest has been extended by the development of a liquid cell allowing nanoindentation, nano-scratch & wear testing of samples fully immersed in liquid. A friction transducer extension also allows immersed sample friction measurements. The fluid cell works with the existing pendulum design and the horizontal loading has several key advantages for testing in fluid.


  • Constant buoyancy force

  • Constant surface tension on loading column

  • Liquid is not underneath capacitor


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Many materials, particularly polymeric materials, show interesting transitions in mechanical properties and creep behaviour at sub-ambient temperatures. Understanding this behaviour is critical to exploring the use of these materials in extreme environments.  The cold stage from Micro Materials allows you to do this.

The cold stage uses Peltier cooling to cool both the sample stage and indenter to the required test temperature. Proprietary techniques then ensure isothermal contact between the indenter and the sample. Experiments take place in a nitrogen purged atmosphere to stop the formation of ice crystals in the test region. Testing can then be performed at any temperature from room temperature down to -20 ºC


  • Fully programmable experimental conditions

  • Isothermal contact

  • Test versatility

AFM Nanoindentation

The properties of many materials can vary significantly with changes to humidity.  This can be especially true of polymeric or biological samples.  Obtaining meaningful test results for prediction of true-life performance is better achieved by closely simulating service conditions.  The rapid change Humidity Cell module can assist considerably in achieving this.

The humidity cell utilises a small external water vapour generator linked to a controller to provide the required humidity in the test cell.  An in-line desiccant is also present to pre-dry the air prior to controlled steam addition.  A full range of humidity from 10% to 90% is therefore possible, irrespective of ambient room conditions. Suitable for investigating the effect of humidity in:


  • Biological studies                             

  • Polymer films and nanocomposites

  • Tribology of biomaterials


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Images taken on wood cells using the four lenses on the multiple objective microscope. Images can then be used to position indent sites. The sample stage features five pre-set positions:


  • 1: High temperature optics

  • 2: NanoTest (Low Load Head)

  • 3: AFM

  • 4: MicroTest (High Load Head)

  • 5: Multiple Objective Microscope

In order to target/ avoid specific structures on samples, the NanoTest Vantage is equipped with several imaging options. These options are also useful for reviewing residual damage post indent/ scratch/ impact.


The system is equipped with a multiple objective microscope and side-view optics as standard, and the user can then choose to add additional capability such as high temperature optics, an in-situ 3D profiler, or an AFM.

Other Advanced AFM Modes

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Researchers are increasingly demanding that test conditions closely mimic real-world environments in order to provide the most reliable, accurate prediction of properties.  With the NanoTest Vantage, Micro Materials already offers the most comprehensive

Micro Materials has considerable experience in providing instruments capable of high and low temperature testing.  Until recently, the limitations of these have been oxidation at high temperatures and condensation/frosting at sub-zero temperatures.  Testing under vacuum negates these and allows further expansion of the temperature capabilities of the NanoTest. The benefits to users are:


  •          Extended high temperature capabilities beyond the 750 °C provided by the NanoTest Vantage

  •          Enhanced low temperaturecapability to below -100 °C without frosting of samples

  •          Ultra-low thermal drift due to same construction principles

  •          Complete range of nanomechanical tests remain available at -100 to 950 °C

  •          Ability to backfill with gas to match material operating environments

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